Edwards turbo pump manual

Edwards EXC Turbo Pump Controllers Instruction www.doorway.ru ( KB) Edwards XDD1 A A Operating Instructions Dry Diaphragm Pump ( MB) EXT /H Split Flow Compound Turbomolecular Pump Manual B, EXT ( MB). IPUP2 dry pump IPUP2 is a compact, low energy, m3/h dry pump for wafer handling and other clean duty applications. It provides fast pump down of load lock chambers with low energy consumption. IPUP2 is small and light for load lock and clean applications. It’s low vibration and low noise levels make it ideal for on-tool use or within a fab. If you have any doubt as to the suitability of the RV pump for your application, refer to the Edwards guidelines on vacuum pump and vacuum system safety (see the Associated publications at the end of the Contents list at the front of this manual).A suitably .

Pump for Turbo X upgrade installed meet all safety and compliance standards specified for the original instruments. Refer to the original instrument instruction manuals for details. Information Oil Free IDP-3 Scroll Pump for Turbo X has been designed and tested in accordance with recognized safety standards, and is designed for use indoors. Turbo Vacuum offers a wide range of turbo pump repair kits, Specialty tools, and Repair guides for many of the turbo pumps used today, obsolete and new. This includes Balzer/Pfeiffer, Leybold, Varian, Edwards and many more not listed below. Our repair kits are engineered to meet or exceed the specifications of the OEM, giving you the same quality components needed to repair the pumps yourself. Thank you very much for purchasing BOC Edwards' turbomolecular pump. The turbomolecular pump is designed to be installed in the vacuum equipment to exhaust gases from it. This manual covers all items necessary to ensure safe installation, operation and maintenance of the following series of the STP-A turbomolecular pump.

the nEXT85 pump, connect it to the customer control equipment and power supply or, alternatively, use the Edwards TIC Turbo Instrument Controller, TIC Turbo Controller or TAG Controller (see Electrical data on page 95). WARNING: Improper use of the equipment could cause damage to it or injur y to people. The user is. Edwards T-Station Manual and Specs Sheet (0) Turbo Pumps: Edwards nEXT Turbo Pumps Product www.doorway.ru ( MB) Turbomolecular Pumps: Edwards STP Series Turbo Molecular Pumps (0) Edwards T-Stations nEXT www.doorway.ru ( MB) Edwards STP-iX, iXL Turbomolecular Pump Instruction www.doorway.ru (0). Consult Edwards about conditions. *2 A backup rotational speed is the lowest rotational speed to which the magnetic bear ing can be backed up at a power failure. *3 Mass is a value of state that the only standard accessory was installed (except the optional accessory).